Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9388493 | Self-cleaning shutter for CVD reactor | Chenghung Paul Chang, Alexander I. Gurary | 2016-07-12 |
| 9273413 | Wafer carrier with temperature distribution control | Sandeep Krishnan, Alexander I. Gurary | 2016-03-01 |
| D748591 | Keyed spindle | Sandeep Krishnan, Alexander I. Gurary, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek | 2016-02-02 |