Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507254 | Method of manufacturing substrate with a multilayer reflective film, method of manufacturing a reflective mask blank, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing a semiconductor device | Toshihiko Orihara, Hirofumi Kozakai, Tsutomu Shoki, Junichi Horikawa | 2016-11-29 |
| 9494851 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2016-11-15 |
| 9423685 | Multilayer reflective film formed substrate, reflective mask blank, mask blank, methods of manufacturing the same, reflective mask, and mask | Tsutomu Shoki | 2016-08-23 |
| 9377679 | Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device | Tatsuo Asakawa, Osamu Maruyama, Tsutomu Shoki | 2016-06-28 |
| 9348217 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2016-05-24 |
| 9323141 | Method for producing substrate with multilayer reflective film, method for producing reflective mask blank and method for producing reflective mask | Tsutomu Shoki | 2016-04-26 |
| 9229316 | Method for producing substrate with multilayer reflective film, method for producing reflective mask blank and method for producing reflective mask | Tsutomu Shoki | 2016-01-05 |