Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478409 | Method for coating a workpiece | Markus Kahn, Helmut Schoenherr | 2016-10-25 |
| 9455136 | Controlling the reflow behaviour of BPSG films and devices made thereof | Markus Kahn, Helmut Schoenherr, Ravi Keshav Joshi, Heimo Hofer, Martin Poelzl +1 more | 2016-09-27 |
| 9379196 | Method of forming a trench using epitaxial lateral overgrowth and deep vertical trench structure | Ravi Keshav Joshi, Johannes Baumgartl, Martin Poelzl, Matthias Kuenle, Andreas Haghofer +2 more | 2016-06-28 |