Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9493877 | Etching technique for microfabrication substrates | Jeffery F. Summers, Tao Gilbert | 2016-11-15 |
| 9372185 | MEMS particle sorting actuator and method of manufacture | John S. Foster, Daryl W. Grummitt, Jaquelin K. Spong, Kimberley L. Turner | 2016-06-21 |
| 9324613 | Method for forming through substrate vias with tethers | Zhimin Jamie Yao | 2016-04-26 |