Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9528078 | Antioxidants for post-CMP cleaning formulations | David Angst, Peng Zhang, Prerna Sonthalia, Emanuel I. Cooper, Karl E. Boggs | 2016-12-27 |
| 9340760 | Non-amine post-CMP composition and method of use | Jun Liu, Peng Zhang | 2016-05-17 |