Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425057 | Method and apparatus for manufacturing three-dimensional-structure memory device | Sung Kil CHO, Sang Ho Woo, Seung Woo Shin, Gil Sun Jang, Wan Suk Oh | 2016-08-23 |
| 9396954 | Method and apparatus for manufacturing three-dimensional-structure memory device | Sung Kil CHO, Sang Ho Woo, Seung Woo Shin, Gil Sun Jang, Wan Suk Oh | 2016-07-19 |
| 9312125 | Cyclic deposition method for thin film formation, semiconductor manufacturing method, and semiconductor device | Seok-Yun Kim, Chang-Hun Shin, Jeong Hoon Lee | 2016-04-12 |