Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9363609 | Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same | Wolfgang Friza, Thomas Grille, Klaus Muemmler, Carsten Ahrens | 2016-06-07 |