Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9360302 | Film thickness monitor | Kevin O'Brien, Farhat A. Quli, Mei Sun | 2016-06-07 |
| 9356822 | Automated interface apparatus and method for use in semiconductor wafer handling systems | — | 2016-05-31 |
| 9304160 | Defect inspection apparatus, system, and method | Christopher P. Kirk | 2016-04-05 |
| 9305753 | Thickness change monitor wafer for in situ film thickness monitoring | Kevin O'Brien | 2016-04-05 |