Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230794 | Process for cleaning, drying and hydrophilizing a semiconductor wafer | Guenter Schwab, Clemens Zapilko, Thomas Buschhardt | 2016-01-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230794 | Process for cleaning, drying and hydrophilizing a semiconductor wafer | Guenter Schwab, Clemens Zapilko, Thomas Buschhardt | 2016-01-05 |