Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443713 | Oxidizing aqueous cleaner for the removal of post-etch residues | Michael B. Korzenski, Martha M. Rajaratnam | 2016-09-13 |
| 9422513 | Metal and dielectric compatible sacrificial anti-reflective coating cleaning and removal composition | Melissa K. Rath, David Bernhard, Thomas H. Baum | 2016-08-23 |
| 9256134 | Photoresist removal | Melissa K. Rath, David Bernhard, Thomas H. Baum | 2016-02-09 |