Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513568 | Lithographic apparatus | Jan Steven Christiaan Westerlaken, Ruud Hendrikus Martinus Johannes Bloks, Peter A. Delmastro, Thibault Simon Mathieu Laurent, Martinus Hendrikus Antonius Leenders +4 more | 2016-12-06 |
| 9329502 | Lithographic apparatuses and methods for compensating for eigenmode coupling | Mark Henricus Wilhelmus Van Gerven, Bram Paul Theodoor VAN GOCH | 2016-05-03 |