Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9485846 | Method and system for inspecting an EUV mask | Guochong Weng, Youjin Wang, Chiyan Kuan | 2016-11-01 |
| 9460887 | Discharging method for charged particle beam imaging | You-Jin Wang | 2016-10-04 |