Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442133 | Edge electrode for characterization of semiconductor wafers | Dong Chen, Henry Fagg, Jaime Duran | 2016-09-13 |
| 9303631 | Fixture for flattening sample in optical metrology | — | 2016-04-05 |
| 9234814 | Automated re-focusing of interferometric reference mirror | Erik Novak, Colin Farrell | 2016-01-12 |