Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488516 | On-tool mass flow controller diagnostic systems and methods | Alexei V. Smirnov | 2016-11-08 |
| 9256228 | Mass flow controller with onboard diagnostics, prognostics, and data logging | Alexei V. Smirnov, Patrick Albright, Cy Jordan, Michael J. Zolock, Ryan W. Johnson +1 more | 2016-02-09 |