Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9428833 | Method and apparatus for backside deposition reduction by control of wafer support to achieve edge seal | Chloe Baldasseroni | 2016-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9428833 | Method and apparatus for backside deposition reduction by control of wafer support to achieve edge seal | Chloe Baldasseroni | 2016-08-30 |