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Companies
Inventors
AE
Akimitsu Ebihara
NI
Nikon
: 1 patents #89 of 289
Top 35%
Overall (2016):
#476,543
of 481,213
Top 100%
1
Patents 2016
Issued Patents
2016
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Patent #
Title
Co-Inventors
Date
9274437
Exposure apparatus and device manufacturing method
—
2016-03-01
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