| 9455393 |
Low temperature deposition of low loss dielectric layers in superconducting circuits |
Ashish Bodke, Mark Clark |
2016-09-27 |
| 9425376 |
Plasma cleaning of superconducting layers |
Andy Steinbach |
2016-08-23 |
| 9373497 |
Methods for stripping photoresist and/or cleaning metal regions |
David Chen, Haruhiro Harry Goto, Martina Su, Shamsuddin Alokozai |
2016-06-21 |
| 9324767 |
Superconducting junctions |
Andrew Steinbach, Tony Bonetti, Kurt Pang, Yun Wang |
2016-04-26 |
| 9312137 |
Reduction of native oxides by annealing in reducing gas or plasma |
Amol Joshi, Kevin Kashefi, Albert S. Lee, Abhijit Pethe, J Watanabe |
2016-04-12 |
| 9281463 |
Atomic layer deposition of metal-oxide tunnel barriers using optimized oxidants |
Andy Steinbach |
2016-03-08 |
| 9245743 |
Methods for forming high-k dielectrics containing hafnium and zirconium using atomic layer deposition |
Khaled Ahmed |
2016-01-26 |
| 9245793 |
Plasma treatment of low-K surface to improve barrier deposition |
Ratsamee Limdulpaiboon, Chi-I Lang, J. Watanabe, Wenxian Zhu |
2016-01-26 |