Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442230 | Sub-wavelength extreme ultraviolet metal transmission grating and manufacturing method thereof | Hailiang Li, Changqing Xie, Ming Liu, Dongmei Li, Xiaoli Zhu | 2016-09-13 |