Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431221 | Plasma-processing apparatus with upper electrode plate and method for performing plasma treatment process | Chih-Ching Cheng, Hsin-Yi Tsai, Xiao-Meng Chen | 2016-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431221 | Plasma-processing apparatus with upper electrode plate and method for performing plasma treatment process | Chih-Ching Cheng, Hsin-Yi Tsai, Xiao-Meng Chen | 2016-08-30 |