Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9451684 | Dual pulse driven extreme ultraviolet (EUV) radiation source method | Daniel A. Corliss, Veeresh V. Deshpande, Oleg Gluschenkov, Sivarama Krishnan | 2016-09-20 |
| 9301381 | Dual pulse driven extreme ultraviolet (EUV) radiation source utilizing a droplet comprising a metal core with dual concentric shells of buffer gas | Daniel A. Corliss, Veeresh V. Deshpande, Oleg Gluschenkov, Sivarama Krishnan | 2016-03-29 |