Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9389516 | Resist performance for the negative tone develop organic development process | Luisa D. Bozano, Dario L. Goldfarb, Hoa D. Truong, HsinYu Tsai, Gregory M. Walraff | 2016-07-12 |
| 9250529 | Photoresist compositions and methods of use in high index immersion lithography | Hiroshi Ito, Daniel P. Sanders | 2016-02-02 |