Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412620 | Three-dimensional integrated circuit device fabrication including wafer scale membrane | Sampath Purushothaman, James Vichiconti | 2016-08-09 |
| 9318375 | Method of fabricating ultra-deep vias and three-dimensional integrated circuits using ultra-deep vias | Mark Todhunter Robson | 2016-04-19 |