Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494852 | Mask blank and method of manufacturing phase shift mask | Yasushi Okubo | 2016-11-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494852 | Mask blank and method of manufacturing phase shift mask | Yasushi Okubo | 2016-11-15 |