Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502282 | Method of semiconductor manufacture utilizing layer arrangement to improve autofocus | Takuya Hagiwara, Tatsunori Murata | 2016-11-22 |
| 9415241 | Charged particle beam irradiation system | Yuki Ito, Koji Matsuda, Ryosuke Shinagawa, Arao Nishimura | 2016-08-16 |