Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384939 | Electron beam writing apparatus and output control method | Kennosuke Itagaki, Takiji Ishimura | 2016-07-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384939 | Electron beam writing apparatus and output control method | Kennosuke Itagaki, Takiji Ishimura | 2016-07-05 |