Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257271 | Semiconductor device manufacturing method, substrate processing apparatus, and non-transitory recording medium | — | 2016-02-09 |
| 9236242 | Substrate processing method and substrate processing apparatus | Tadashi Terasaki, Unryu Ogawa, Akito Hirano | 2016-01-12 |