Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9512118 | Crystal of fused heterocyclic compound | — | 2016-12-06 |
| 9441294 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Yuki TAIRA | 2016-09-13 |