Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318299 | Charged particle beam device having an energy filter | Hiroyuki Ito | 2016-04-19 |
| 9305745 | Scanning electron microscope | Wataru MORI, Hiroyuki Ito, Hiromi Inada | 2016-04-05 |
| 9228035 | Photo-curable nanoimprint composition, method for formatting pattern using the composition, and nanoimprint replica mold comprising cured product of the composition | Hideki Umekawa, Yuichiro Kawabata | 2016-01-05 |