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Motohiro Tanaka

HHHitachi High-Technologies: 1 patents #175 of 444Top 40%
Overall (2016): #283,312 of 481,213Top 60%
1 Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9496147 Plasma processing apparatus and plasma processing method Masahiro Sumiya 2016-11-15

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