Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490104 | Heat treatment apparatus | Ken'etsu Yokogawa, Masatoshi Miyake, Takashi Uemura, Satoshi Sakai | 2016-11-08 |
| 9368377 | Plasma processing apparatus | Takumi Tandou, Kenetsu Yokogawa | 2016-06-14 |