Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384946 | Plasma processing apparatus | Kohei Sato, Yutaka Ohmoto | 2016-07-05 |
| 9343336 | Plasma processing apparatus and plasma processing method | Kohei Sato, Yutaka Omoto | 2016-05-17 |