Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9427762 | Gas injector and cover plate assembly for semiconductor equipment | Tsan-Hua Huang, Paul Wong, Miao-Chan Wu | 2016-08-30 |
| 9328419 | Gas treatment apparatus with surrounding spray curtains | Jui-Sheng CHENG | 2016-05-03 |
| 9269547 | Semiconductor equipment | Jui-Sheng CHENG, Tsan-Hua Huang | 2016-02-23 |