Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9522840 | Blank of TiO2-SiO2 glass for a mirror substrate for use in EUV lithography and method for the production thereof | Stephan Thomas, Klaus Becker | 2016-12-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9522840 | Blank of TiO2-SiO2 glass for a mirror substrate for use in EUV lithography and method for the production thereof | Stephan Thomas, Klaus Becker | 2016-12-20 |