Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9517494 | Method and system for cleaning photomasks | — | 2016-12-13 |
| 9296023 | Air-blown cleaning system for photomasks and method thereof | Tsung-Yi Yang, Liang-Wei Lai | 2016-03-29 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9517494 | Method and system for cleaning photomasks | — | 2016-12-13 |
| 9296023 | Air-blown cleaning system for photomasks and method thereof | Tsung-Yi Yang, Liang-Wei Lai | 2016-03-29 |