Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9435921 | Blazed grating spectral purity filter and methods of making such a filter | Lei Sun | 2016-09-06 |
| 9436078 | Method for a low profile etchable EUV absorber layer with embedded particles in a photolithography mask | Lei Sun | 2016-09-06 |
| 9298081 | Scattering enhanced thin absorber for EUV reticle and a method of making | Lei Sun | 2016-03-29 |
| 9275449 | Methods and systems for determining a dose-to-clear of a photoresist | Lei Sun | 2016-03-01 |