Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269809 | Methods for forming protection layers on sidewalls of contact etch stop layers | Marco Lepper, Katrin Reiche | 2016-02-23 |
| 9245860 | Metallization system of a semiconductor device including metal pillars having a reduced diameter at the bottom | Frank Feustel, Thomas Werner | 2016-01-26 |