Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9395621 | Pellicles and devices comprising a photomask and the pellicle | Soon Yoeng Tan, Ngar Chen Stella Lau, Sia Kim Tan | 2016-07-19 |
| 9286435 | System and methods for OPC model accuracy management and disposition | Yong Cheng, Andrew Khoh, Yee Mei Foong | 2016-03-15 |
| 9257277 | Methods for extreme ultraviolet mask defect mitigation by multi-patterning | Tan Soon Yoeng | 2016-02-09 |