Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329497 | Substrate table, lithographic apparatus and device manufacturing method | Rene Theodorus Petrus Compen | 2016-05-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329497 | Substrate table, lithographic apparatus and device manufacturing method | Rene Theodorus Petrus Compen | 2016-05-03 |