Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437465 | Substrate processing apparatus and method of manufacturing semiconductor device | Satoru Takahata, Reizo Nunozawa | 2016-09-06 |
| 9349501 | Gas insulated switchgear and manufacturing method of the same | Takashi Miyamoto, Yuko Sawada, Hitoshi Sadakuni, Shohei Sasayama, Kazuki Kubo +1 more | 2016-05-24 |