HY

Haruhiko Yamamoto

UL Ulvac: 1 patents #7 of 68Top 15%
Overall (2016): #385,412 of 481,213Top 85%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9310524 Film deposition apparatus and film deposition method Kenjiro Kokubu 2016-04-12