Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508880 | Method for processing a minute structure on a surface of the silicon substrate | Ryosuke Motoyoshi | 2016-11-29 |
| 9471065 | Integrated type gas supplying apparatus | Mutsunori Koyomogi, Michio Yamaji, Takahiro Matsuda | 2016-10-18 |
| 9383758 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2016-07-05 |
| 9337361 | Photoelectric conversion device and manufacturing method thereof | Naoto Kusumoto | 2016-05-10 |