Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417530 | Method for developing resist, method for forming a resist pattern, method for producing a mold, and developing fluid utilized in these methods | Toru Tsuchihashi, Tomokazu SEKI | 2016-08-16 |