Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9465292 | Positive type resist composition for use in liquid immersion exposure and a method of forming the pattern using the same | Hiromi Kobayashi | 2016-10-11 |
| 9316912 | Positive type resist composition for use in liquid immersion exposure and a method of forming the pattern using the same | Hiromi Kobayashi | 2016-04-19 |