Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437505 | Method of measuring contamination amount of vapor phase growth apparatus, and method of manufacturing epitaxial wafer | Takeshi Arai | 2016-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437505 | Method of measuring contamination amount of vapor phase growth apparatus, and method of manufacturing epitaxial wafer | Takeshi Arai | 2016-09-06 |