Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9347974 | Method for determining beam parameters of a charge carrier beam, measuring device, and charge carrier beam device | Uwe Reisgen, Jens De Vries, Alexander Backhaus, Sebastian Ufer, Bernd Reichenberg +1 more | 2016-05-24 |