Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269582 | Cluster ion implantation of arsenic and phosphorus | Oleg Byl, Chongying Xu, William Hunks | 2016-02-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269582 | Cluster ion implantation of arsenic and phosphorus | Oleg Byl, Chongying Xu, William Hunks | 2016-02-23 |