Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390986 | Polishing apparatus and polishing method | Yoichi Kobayashi | 2016-07-12 |
| 9233449 | Polishing method, polishing apparatus and GaN wafer | Yasuhisa Sano, Kazuto Yamauchi, Junji Murata, Shun Sadakuni | 2016-01-12 |