Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9393670 | Measuring method of surface roughness of polishing pad | — | 2016-07-19 |
| 9242339 | Polishing apparatus and polishing method | Yoshihiro Mochizuki, Chikako TAKATOH, Tadashi OBO | 2016-01-26 |