Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9423179 | System having a process chamber for workpieces | Dietmar Wieland, Christof Knuesel, Marius Winkler | 2016-08-23 |
| 9316406 | Process chamber incorporating an arrangement for injecting gaseous fluid thereinto | Dietmar Wieland, Christof Knuesel, Marius Winkler | 2016-04-19 |