Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9366964 | Compositions and antireflective coatings for photolithography | Yuanqiao Rao, Robert L. Auger, Cecilia W. Kiarie, Christopher P. Sullivan | 2016-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9366964 | Compositions and antireflective coatings for photolithography | Yuanqiao Rao, Robert L. Auger, Cecilia W. Kiarie, Christopher P. Sullivan | 2016-06-14 |